{"id":99491,"date":"2024-11-22T17:51:57","date_gmt":"2024-11-22T09:51:57","guid":{"rendered":"https:\/\/www.techphant.cn\/?p=99491"},"modified":"2024-11-22T17:52:00","modified_gmt":"2024-11-22T09:52:00","slug":"spkgxpdzy","status":"publish","type":"post","link":"https:\/\/www.techphant.cn\/blog\/99491.html","title":{"rendered":"\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u4f5c\u7528"},"content":{"rendered":"\n

\u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247<\/strong>\u662f\u4e00\u79cd\u7528\u4e8e\u63a7\u5236\u5c04\u9891\u4fe1\u53f7\u4f20\u8f93\u548c\u63a5\u6536\u7684\u7535\u5b50\u7ec4\u4ef6\uff0c\u5176\u4e3b\u8981\u4f5c\u7528\u5305\u62ec\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n\n\n\n

\u3000\u3000\u4fe1\u53f7\u8def\u5f84\u5207\u6362\uff1a\u5c04\u9891\u5f00\u5173\u82af\u7247\u80fd\u591f\u5c06\u591a\u8def\u5c04\u9891\u4fe1\u53f7\u4e2d\u7684\u4efb\u4e00\u8def\u6216\u51e0\u8def\u901a\u8fc7\u63a7\u5236\u903b\u8f91\u8fde\u901a\uff0c\u4ee5\u5b9e\u73b0\u4e0d\u540c\u4fe1\u53f7\u8def\u5f84\u7684\u5207\u6362\u3002\u8fd9\u5305\u62ec\u63a5\u6536\u4e0e\u53d1\u5c04\u7684\u5207\u6362\u3001\u4e0d\u540c\u9891\u6bb5\u95f4\u7684\u5207\u6362\u7b49\u3002\u8fd9\u79cd\u529f\u80fd\u4f7f\u5f97\u5c04\u9891\u5f00\u5173\u5728\u5171\u7528\u5929\u7ebf\u7684\u60c5\u51b5\u4e0b\uff0c\u80fd\u591f\u8282\u7701\u7ec8\u7aef\u4ea7\u54c1\u7684\u6210\u672c\u3002<\/p>\n\n\n\n

\u3000\u3000\u51cf\u5c11\u4fe1\u53f7\u5e72\u6270\uff1a\u5c04\u9891\u5f00\u5173\u5e94\u7528\u4e8e\u5c04\u9891\u4fe1\u53f7\u7684\u63a5\u6536\u548c\u53d1\u5c04\u901a\u8def\u4e2d\uff0c\u53ef\u4ee5\u51cf\u5c11\u4e0d\u540c\u4fe1\u53f7\u4e4b\u95f4\u7684\u76f8\u4e92\u5e72\u6270\uff0c\u63d0\u9ad8\u4fe1\u53f7\u6536\u53d1\u7684\u7075\u654f\u5ea6<\/p>\n\n\n\n

\u3000\u3000\u63d0\u9ad8\u4fe1\u53f7\u8d28\u91cf\uff1a \u5c04\u9891\u5f00\u5173\u901a\u8fc7\u63a7\u5236\u7aef\u53e3\u7535\u538b\u6765\u6539\u53d8\u5404\u7aef\u53e3\u7684\u8fde\u901a\u6027\uff0c\u4ece\u800c\u5b9e\u73b0\u4fe1\u53f7\u7684\u9ad8\u6548\u4f20\u8f93\u548c\u5c4f\u853d\uff0c\u540c\u65f6\u5177\u5907\u8f83\u4f4e\u7684\u63d2\u5165\u635f\u8017\u548c\u8f83\u9ad8\u7684\u9694\u79bb\u5ea6\u3002<\/p>\n\n\n\n

\u3000\u3000\u5e7f\u6cdb\u5e94\u7528\u4e8e\u79fb\u52a8\u667a\u80fd\u7ec8\u7aef\uff1a\u5c04 \u9891\u5f00\u5173\u82af\u7247\u5e7f\u6cdb\u5e94\u7528\u4e8e\u667a\u80fd\u624b\u673a\u7b49\u79fb\u52a8\u667a\u80fd\u7ec8\u7aef\uff0c\u662f\u5c04\u9891\u524d\u7aef\u82af\u7247\u7684\u91cd\u8981\u7ec4\u6210\u90e8\u5206\u3002\u968f\u77405G\u901a\u8baf\u7684\u666e\u53ca\uff0c\u5355\u673a\u5c04\u9891\u5f00\u5173\u7684\u9700\u6c42\u4e5f\u4f1a\u589e\u52a0\uff0c\u9884\u8ba15G\u624b\u673a\u7684\u5355\u673a\u5c04\u9891\u5f00\u5173\u7528\u91cf\u4e3a15\u4e2a\uff0c\u6bd44G\u624b\u673a\u591a\u51fa\u4e00\u500d\u3002<\/p>\n\n\n\n

\u3000\u3000\u591a\u79cd\u4ea7\u54c1\u79cd\u7c7b\uff1a\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u4e3b\u8981\u4ea7\u54c1\u79cd\u7c7b\u5305\u62ec\u79fb\u52a8\u901a\u4fe1\u4f20\u5bfc\u5f00\u5173\u3001WiFi\u5f00\u5173\u3001\u5929\u7ebf\u8c03\u8c10\u5f00\u5173\u7b49\u3002\u8fd9\u4e9b\u5f00\u5173\u82af\u7247\u53ef\u4ee5\u6839\u636e\u7528\u9014\u548c\u5200\u6570\u3001\u63b7\u6570\u7684\u4e0d\u540c\u8fdb\u884c\u5206\u7c7b\uff0c\u5982\u5355\u5200\u5355\u63b7\u3001\u5355\u5200\u53cc\u63b7\u3001\u5355\u5200\u591a\u63b7\u548c\u591a\u5200\u591a\u63b7\u5f00\u5173<\/p>\n\n\n\n

\u3000\u3000\u6280\u672f\u5b9e\u73b0\uff1a\u5c04\u9891\u5f00\u5173\u82af\u7247\u53ef\u4ee5\u91c7\u7528\u4e0d\u540c\u7684\u6280\u672f\u5b9e\u73b0\uff0c\u5982CMOS\u6676\u4f53\u7ba1\u3001GaAs\u3001MESFETs\u3001PIN\u4e8c\u6781\u7ba1\u6216MEMS\u7b49\u3002\u8fd9\u4e9b\u6280\u672f\u7684\u9009\u62e9\u53d6\u51b3\u4e8e\u6240\u9700\u7684\u6027\u80fd\u6307\u6807\uff0c\u5982\u529f\u7387\u5904\u7406\u80fd\u529b\u3001\u63d2\u5165\u635f\u8017\u3001\u4e92\u8c03\u548c\u8c10\u6ce2\u5931\u771f\u7b49\u3002<\/p>\n\n\n\n

\u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247\u5728\u65e0\u7ebf\u901a\u4fe1\u7cfb\u7edf\u4e2d\u626e\u6f14\u7740\u81f3\u5173\u91cd\u8981\u7684\u89d2\u8272\uff0c\u901a\u8fc7\u63a7\u5236\u5c04\u9891\u4fe1\u53f7\u7684\u4f20\u8f93\u548c\u63a5\u6536\uff0c\u5b9e\u73b0\u9ad8\u6548\u3001\u4f4e\u5e72\u6270\u7684\u4fe1\u53f7\u5207\u6362\u548c\u63a7\u5236\uff0c\u4ece\u800c\u63d0\u5347\u65e0\u7ebf\u8bbe\u5907\u7684\u6574\u4f53\u6027\u80fd\u548c\u7528\u6237\u4f53\u9a8c\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\u3000\u3000\u4e00\u3001 \u5c04\u9891\u5f00\u5173\u82af\u7247\u57285G\u901a\u4fe1\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u548c\u4f18\u52bf\u662f\u4ec0\u4e48?<\/h2>\n\n\n\n

\u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247\u57285G\u901a\u4fe1\u4e2d\u7684\u5177\u4f53\u5e94\u7528\u548c\u4f18\u52bf\u4e3b\u8981\u4f53\u73b0\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n\n\n\n

    \n
  • \u3000\u3000\u4fe1\u53f7\u8def\u5f84\u5207\u6362<\/strong>\uff1a\u5c04\u9891\u5f00\u5173\u7528\u4e8e\u63a7\u5236\u5c04\u9891\u4fe1\u53f7\u901a\u9053\u7684\u8f6c\u6362\uff0c\u5305\u62ec\u63a5\u6536\u4e0e\u53d1\u5c04\u7684\u5207\u6362\u3001\u4e0d\u540c\u9891\u6bb5\u95f4\u7684\u5207\u6362\u7b49\u3002\u8fd9\u5bf9\u4e8e5G\u901a\u4fe1\u7cfb\u7edf\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a5G\u9891\u6bb5\u8f83\u591a\u4e14\u590d\u6742\uff0c\u9700\u8981\u7075\u6d3b\u5730\u5728\u4e0d\u540c\u9891\u6bb5\u4e4b\u95f4\u5207\u6362\u4ee5\u9002\u5e94\u4e0d\u540c\u7684\u7f51\u7edc\u73af\u5883\u548c\u901a\u4fe1\u9700\u6c42\u3002<\/li>\n\n\n\n
  • \u3000\u3000\u5171\u7528\u5929\u7ebf\u548c\u6210\u672c\u8282\u7701<\/strong>\uff1a\u5c04\u9891\u5f00\u5173\u53ef\u4ee5\u5b9e\u73b0\u591a\u8def\u5c04\u9891\u4fe1\u53f7\u4e2d\u7684\u4efb\u4e00\u8def\u6216\u51e0\u8def\u901a\u8fc7\u63a7\u5236\u903b\u8f91\u8fde\u901a\uff0c\u4ece\u800c\u8fbe\u5230\u5171\u7528\u5929\u7ebf\u7684\u76ee\u7684\u3002\u8fd9\u4e0d\u4ec5\u63d0\u9ad8\u4e86\u5929\u7ebf\u7684\u5229\u7528\u7387\uff0c\u8fd8\u663e\u8457\u964d\u4f4e\u4e86\u7ec8\u7aef\u4ea7\u54c1\u7684\u6210\u672c\u3002<\/li>\n\n\n\n
  • \u3000\u3000\u9ad8\u6027\u80fd\u548c\u9ad8\u96c6\u6210\u5ea6<\/strong>\uff1a\u73b0\u4ee3\u5c04\u9891\u5f00\u5173\u82af\u7247\u5177\u6709\u9ad8\u96c6\u6210\u5ea6\u548c\u9ad8\u6027\u80fd\u7684\u7279\u70b9\u3002\u4f8b\u5982\uff0c\u56fd\u535a\u7535\u5b50\u5f00\u53d1\u7684\u65b0\u4e00\u4ee3\u5e94\u7528\u4e8e5G\u57fa\u7ad9\u667a\u80fd\u5929\u7ebf\u7684\u5f00\u5173\u63a7\u5236\u82af\u7247\u548c\u6a21\u5757\uff0c\u5728\u7ebf\u6027\u529f\u7387\u7b49\u5404\u9879\u6307\u6807\u4e0a\u5927\u5e45\u63d0\u5347\uff0c\u5c3a\u5bf8\u548c\u6210\u672c\u660e\u663e\u4e0b\u964d\uff0c\u4ea7\u54c1\u6027\u80fd\u8fbe\u5230\u56fd\u9645\u9886\u5148\u6c34\u5e73\u3002<\/li>\n\n\n\n
  • \u3000\u3000\u652f\u6301\u591a\u79cd\u6807\u51c6\u548c\u9891\u6bb5<\/strong>\uff1a\u5c04\u9891\u5f00\u5173\u7684\u4e3b\u6d41\u5de5\u827a\u5982SOI(\u7845\u7edd\u7f18\u4f53)\u56e0\u5176\u4f4e\u963b\u6297\u3001\u4f4e\u7535\u5bb9\u7b49\u4f18\u52bf\uff0c\u80fd\u591f\u652f\u6301\u591a\u79cd\u6807\u51c6\u548c\u9891\u6bb5\uff0c\u5360\u636e\u5e02\u573a\u4e3b\u5bfc\u5730\u4f4d\u3002\u8fd9\u5bf9\u4e8e5G\u901a\u4fe1\u7cfb\u7edf\u4e2d\u9700\u8981\u517c\u5bb9\u591a\u79cd\u9891\u6bb5\u548c\u6807\u51c6\u7684\u8981\u6c42\u975e\u5e38\u91cd\u8981\u3002<\/li>\n\n\n\n
  • \u3000\u3000\u5c0f\u578b\u5316\u548c\u4f4e\u6210\u672c<\/strong>\uff1a\u968f\u7740\u6280\u672f\u7684\u53d1\u5c55\uff0c\u5c04\u9891\u5f00\u5173\u82af\u7247\u9010\u6e10\u5411\u5c0f\u578b\u5316\u548c\u4f4e\u6210\u672c\u65b9\u5411\u53d1\u5c55\u3002\u4f20\u7edf\u7684\u5fae\u6ce2\u5f00\u5173\u91c7\u7528GaAs\u6216GaN\u7b49\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5de5\u827a\u8bbe\u8ba1\u548c\u5236\u9020\uff0c\u800cSi\u5de5\u827a\u51ed\u501f\u9ad8\u96c6\u6210\u5ea6\u548c\u4f4e\u6210\u672c\u7684\u4f18\u52bf\uff0c\u5df2\u9010\u6e10\u88ab\u7528\u4e8e\u5fae\u6ce2\u548c\u6beb\u7c73\u6ce2\u5f00\u5173\u7684\u8bbe\u8ba1\u3002<\/li>\n\n\n\n
  • \u3000\u3000\u5e7f\u6cdb\u7684\u5e94\u7528\u573a\u666f<\/strong>\uff1a\u5c04\u9891\u5f00\u5173\u5e7f\u6cdb\u5e94\u7528\u4e8e\u667a\u80fd\u624b\u673a\u7b49\u79fb\u52a8\u7ec8\u7aef\u4ee5\u53ca5G\u57fa\u7ad9\u4e2d\u3002\u5728\u57fa\u7ad9\u9886\u57df\uff0c\u5c04\u9891\u5f00\u5173\u3001\u6570\u63a7\u8870\u51cf\u5668\u4ea7\u54c1\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e4G\u30015G\u79fb\u52a8\u901a\u4fe1\u57fa\u7ad9\u4e2d;\u5728\u7ec8\u7aef\u9886\u57df\uff0c\u591a\u4e2a\u5c04\u9891\u5f00\u5173\u88ab\u5ba2\u6237\u5f15\u5165\u5e76\u6279\u91cf\u4ea4\u4ed8\u3002<\/li>\n<\/ul>\n\n\n\n

    \u3000\u3000\u4e8c\u3001 \u5c04\u9891\u5f00\u5173\u82af\u7247\u7684CMOS\u6676\u4f53\u7ba1\u3001GaAs\u3001MESFETs\u3001PIN\u4e8c\u6781\u7ba1\u548cMEMS\u5404\u81ea\u7684\u4f18\u52bf\u548c\u5c40\u9650\u6027<\/h2>\n\n\n\n

    \u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u6280\u672f\u5b9e\u73b0\u4e2d\uff0cCMOS\u6676\u4f53\u7ba1\u3001GaAs\u3001MESFETs\u3001PIN\u4e8c\u6781\u7ba1\u548cMEMS\u5404\u81ea\u5177\u6709\u4e0d\u540c\u7684\u4f18\u52bf\u548c\u5c40\u9650\u6027\u3002<\/p>\n\n\n\n

    \u3000\u30001. CMOS\u6676\u4f53\u7ba1<\/strong>\uff1a<\/h3>\n\n\n\n

    \u3000\u3000\u4f18\u52bf<\/strong>\uff1aCMOS\u6676\u4f53\u7ba1\u5728\u9759\u6001\u7535\u6d41\u51e0\u4e4e\u4e3a\u96f6\u7684\u60c5\u51b5\u4e0b\u5de5\u4f5c\uff0c\u635f\u8017\u5c0f\uff0c\u9759\u6001\u529f\u8017\u63a5\u8fd1\u4e3a\u96f6\uff0c\u53ef\u4ee5\u5728\u82af\u7247\u91cc\u5927\u89c4\u6a21\u96c6\u6210\u3002\u6b64\u5916\uff0cCMOS\u6280\u672f\u5728\u9759\u7535\u653e\u7535(ESD)\u65b9\u9762\u76f8\u5bf9\u7a33\u5b9a\uff0c\u6613\u635f\u503c\u9ad8\u8fbe4kV\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c40\u9650\u6027<\/strong>\uff1a\u5c3d\u7ba1CMOS\u6676\u4f53\u7ba1\u5728\u4f4e\u529f\u8017\u8bbe\u8ba1\u4e2d\u8868\u73b0\u51fa\u8272\uff0c\u4f46\u5728\u9ad8\u9891\u5e94\u7528\u4e2d\u7684\u6027\u80fd\u53ef\u80fd\u4e0d\u5982\u5176\u4ed6\u6280\u672f\u5982GaAs FETs\u3002<\/p>\n\n\n\n

    \u3000\u30002. GaAs<\/strong>\uff1a<\/h3>\n\n\n\n

    \u3000\u3000\u4f18\u52bf<\/strong>\uff1aGaAs\u6750\u6599\u5177\u5907\u7981\u5e26\u5bbd\u5ea6\u5927\u3001\u7535\u5b50\u8fc1\u79fb\u7387\u9ad8\u7684\u7279\u6027\uff0c\u80fd\u663e\u8457\u964d\u4f4e\u5c04\u9891\u5c3a\u5bf8\u548c\u529f\u8017\u3002GaAs\u5f00\u5173\u5bf9\u9759\u7535\u653e\u7535\u8f83\u4e3a\u654f\u611f\uff0c\u4f46\u5176\u9ad8\u8f93\u5165\u963b\u6297\u548c\u826f\u597d\u7684\u70ed\u7a33\u5b9a\u6027\u4f7f\u5176\u5728\u5c04\u9891\u5e94\u7528\u4e2d\u975e\u5e38\u6709\u7528\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c40\u9650\u6027<\/strong>\uff1aGaAs\u5f00\u5173\u901a\u5e38\u9700\u8981\u8f83\u9ad8\u7684\u504f\u7f6e\u7535\u538b\uff0c\u5e76\u4e14\u53ef\u80fd\u6d88\u8017\u8f83\u591a\u7684\u76f4\u6d41\u529f\u7387\u3002<\/p>\n\n\n\n

    \u3000\u30003. MESFETs\uff08\u91d1\u5c5e-\u534a\u5bfc\u4f53\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff09<\/strong>\uff1a<\/h3>\n\n\n\n

    \u3000\u3000\u4f18\u52bf<\/strong>\uff1aMESFETs\u4ee5\u566a\u58f0\u4f4e\u3001\u9891\u5e26\u5bbd\u7b49\u7279\u70b9\uff0c\u5728\u5fae\u6ce2\u529f\u7387\u653e\u5927\u5668\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c40\u9650\u6027<\/strong>\uff1aMESFETs\u7684\u4e3b\u8981\u7f3a\u70b9\u662f\u6805\u504f\u7f6e\u901a\u5e38\u9700\u8981\u4e00\u4e2a\u8d1f\u7535\u538b\uff0cP\u6c9f\u9053FET\u9700\u8981\u6f0f\u6781\u504f\u7f6e\u3002<\/p>\n\n\n\n

    \u3000\u30004. PIN\u4e8c\u6781\u7ba1<\/strong>\uff1a<\/h3>\n\n\n\n

    \u3000\u3000\u4f18\u52bf<\/strong>\uff1aPIN\u4e8c\u6781\u7ba1\u56e0\u5176\u51fa\u8272\u7684\u4e8c\u6781\u7ba1\u5207\u6362\u7279\u6027\u800c\u5360\u636e\u4e3b\u5bfc\u5730\u4f4d\uff0c\u4f8b\u5982\u4f4e\u201c\u5173\u65ad\u201d\u7535\u5bb9\u548c\u975e\u5e38\u4f4e\u7684\u201c\u5bfc\u901a\u201d\u7535\u963b\u3002PIN\u4e8c\u6781\u7ba1\u5f00\u5173\u5bf9ESD\u76f8\u5bf9\u4e0d\u654f\u611f\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c40\u9650\u6027<\/strong>\uff1aPIN\u4e8c\u6781\u7ba1\u662f\u4e24\u7aef\u8bbe\u5907\uff0c\u76f4\u6d41\u504f\u7f6e\u5fc5\u987b\u901a\u8fc7\u5916\u90e8\u53bb\u8026\u5143\u4ef6\u4e0e\u5c04\u9891\u8def\u5f84\u5206\u79bb\uff0c\u8fd9\u589e\u52a0\u4e86\u7535\u8def\u7684\u590d\u6742\u5ea6\u3002\u6b64\u5916\uff0cPIN\u4e8c\u6781\u7ba1\u7684\u9a71\u52a8\u7535\u8def\u975e\u5e38\u590d\u6742\uff0c\u9700\u8981\u4f7f\u7528\u6602\u8d35\u7684\u5bbd\u5e26\u627c\u6d41\u5708\u5e76\u5f15\u5165\u5916\u6765\u7ec4\u88c5\u6280\u672f\u3002<\/p>\n\n\n\n

    \u3000\u30005. MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09<\/strong>\uff1a<\/h3>\n\n\n\n

    \u3000\u3000\u4f18\u52bf<\/strong>\uff1aMEMS\u5229\u7528\u673a\u68b0\u8fd0\u52a8\u5728\u5c04\u9891\u4f20\u8f93\u7ebf\u4e2d\u521b\u5efa\u77ed\u8def\u6216\u5f00\u8def\uff0c\u5177\u6709\u6781\u4f4e\u7684\u635f\u8017\uff0c\u5e76\u4e14\u53ef\u4ee5\u5728\u4ece\u5fae\u6ce2\u9891\u7387\u5230\u6beb\u7c73\u6ce2\u9891\u7387\u7684\u8303\u56f4\u5185\u5de5\u4f5c\u3002MEMS\u5f00\u5173\u91c7\u7528CMOS\u96c6\u6210\u7535\u8def\u5236\u9020\u6280\u672f\uff0c\u80fd\u591f\u5b9e\u73b0\u4f4e\u63a7\u5236\u7535\u538b\u3001\u9ad8\u9694\u79bb\u6bd4\u3001\u9ad8\u6027\u80fd\u548c\u53ef\u9760\u6027\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c40\u9650\u6027<\/strong>\uff1aMEMS\u5f00\u5173\u901a\u5e38\u5bf9\u70ed\u4ea4\u6362\u66f4\u52a0\u654f\u611f\uff0c\u56e0\u4e3a\u70ed\u4ea4\u6362\u53ef\u80fd\u4f1a\u5bfc\u81f4\u89e6\u70b9\u4e4b\u95f4\u53d1\u751f\u5fae\u710a\u63a5\uff0c\u4ece\u800c\u964d\u4f4e\u4f7f\u7528\u5bff\u547d\u3002\u6b64\u5916\uff0cMEMS\u8bbe\u5907\u5728\u4ea7\u54c1\u5f00\u53d1\u5404\u9636\u6bb5\u7684\u53ef\u9760\u6027\u56e0\u7d20\u5c1a\u672a\u5f97\u5230\u5145\u5206\u5f00\u53d1\u3002<\/p>\n\n\n\n

    \u3000\u3000\u4e09\u3001 \u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u63d2\u5165\u635f\u8017\u548c\u9694\u79bb\u5ea6?<\/h2>\n\n\n\n

    \u3000\u3000\u8bc4\u4f30\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u63d2\u5165\u635f\u8017\u548c\u9694\u79bb\u5ea6\u662f\u8861\u91cf\u5176\u6027\u80fd\u7684\u91cd\u8981\u6307\u6807\u3002\u63d2\u5165\u635f\u8017\u662f\u6307\u5f00\u5173\u5904\u4e8e\u5bfc\u901a\u72b6\u6001\u4e0b\u7684\u529f\u7387\u635f\u8017\uff0c\u5b83\u5728\u53d1\u5c04\u7aef\u5f71\u54cd\u8f93\u51fa\u529f\u7387\uff0c\u5728\u63a5\u6536\u7aef\u5f71\u54cd\u63a5\u6536\u7075\u654f\u5ea6\uff0c\u56e0\u6b64\u63d2\u5165\u635f\u8017\u8d8a\u4f4e\u8d8a\u597d\u3002\u9694\u79bb\u5ea6\u5219\u662f\u7535\u8def\u8f93\u5165\u7aef\u548c\u8f93\u51fa\u7aef\u4e4b\u95f4\u7684\u8870\u51cf\u7a0b\u5ea6\uff0c\u662f\u8861\u91cf\u5f00\u5173\u622a\u6b62\u6709\u6548\u6027\u7684\u6307\u6807\uff0c\u9694\u79bb\u5ea6\u8d8a\u9ad8\u8d8a\u597d\u3002<\/p>\n\n\n\n

    \u3000\u3000\u4e3a\u4e86\u51c6\u786e\u8bc4\u4f30\u8fd9\u4e9b\u53c2\u6570\uff0c\u53ef\u4ee5\u4f7f\u7528\u4e13\u4e1a\u7684\u6d4b\u8bd5\u8bbe\u5907\uff0c\u5982NI VST\u77e2\u91cf\u4fe1\u53f7\u6536\u53d1\u4eea\u8fdb\u884c\u63d2\u5165\u635f\u8017\u6d4b\u8bd5\u3002\u6b64\u5916\uff0c\u901a\u8fc7\u5b9e\u9a8c\u548c\u4eff\u771f\u7ed3\u679c\u7684\u5bf9\u6bd4\uff0c\u5982\u4f7f\u7528Agilent 8510C\u7f51\u7edc\u5206\u6790\u4eea\u548cCascade\u63a2\u9488\u7ad9\u6d4b\u91cfRF\u5f00\u5173\u7684S\u53c2\u6570\uff0c\u53ef\u4ee5\u83b7\u53d6\u5f00\u5173\u5728\u4e0d\u540c\u9891\u7387\u4e0b\u7684\u63d2\u5165\u635f\u8017\u548c\u9694\u79bb\u5ea6\u6570\u636e\u3002\u4f8b\u5982\uff0c\u5728\u672a\u65bd\u52a0\u7535\u538b\u7684\u60c5\u51b5\u4e0b\uff0c\u67d0RF\u5f00\u5173\u572835 GHz\u5904\u7684\u63d2\u5165\u635f\u8017\u4e3a0.9 dB\uff0c\u800c\u5728\u65bd\u52a014 V\u6fc0\u6d3b\u7535\u538b\u65f6\uff0c\u5176\u9694\u79bb\u5ea6\u4e3a21 dB\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5728\u5b9e\u9645\u5e94\u7528\u4e2d\uff0c\u9ad8\u6027\u80fd\u5c04\u9891\u5f00\u5173\u5e94\u5177\u6709\u4f4e\u63d2\u5165\u635f\u8017\u548c\u9ad8\u9694\u79bb\u5ea6\uff0c\u4ee5\u786e\u4fdd\u4fe1\u53f7\u4f20\u8f93\u7684\u9ad8\u6548\u6027\u548c\u7cfb\u7edf\u7684\u7a33\u5b9a\u6027\u3002\u4f8b\u5982\uff0c\u67d0\u4e9b\u5c04\u9891\u5f00\u5173\u4ea7\u54c1\u5728\u4e1a\u5185\u5904\u4e8e\u9886\u5148\u6c34\u5e73\uff0c\u5176\u63d2\u5165\u635f\u8017\u53ef\u4f4e\u81f30.1dB\u4ee5\u4e0b\uff0c\u9694\u79bb\u5ea6\u53ef\u9ad8\u8fbe\u51e0\u5341dB\u3002\u6b64\u5916\uff0c\u91c7\u7528\u65b0\u6750\u6599\u548c\u5148\u8fdb\u5de5\u827a\u7684\u5c04\u9891\u5f00\u5173\uff0c\u5982PCM RF switch\uff0c\u5176\u5728\u5fae\u6ce2\u548c\u6beb\u7c73\u6ce2\u9891\u6bb5\u7684\u63d2\u5165\u635f\u8017\u751a\u81f3\u4f4e\u4e8eMEMS\u5c04\u9891\u5f00\u5173\uff0c\u663e\u793a\u51fa\u5353\u8d8a\u7684\u6027\u80fd\u3002<\/p>\n\n\n\n

    \u3000\u3000\u56db\u3001 \u5c04\u9891\u5f00\u5173\u82af\u7247\u5728\u51cf\u5c11\u4fe1\u53f7\u5e72\u6270\u65b9\u9762\u7684\u673a\u5236<\/h2>\n\n\n\n

    \u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247\u5728\u51cf\u5c11\u4fe1\u53f7\u5e72\u6270\u65b9\u9762\u7684\u673a\u5236\u4e3b\u8981\u4f53\u73b0\u5728\u5176\u9ad8\u9694\u79bb\u5ea6\u548c\u63a7\u5236\u903b\u8f91\u4e0a\u3002\u5c04\u9891\u5f00\u5173\u80fd\u591f\u63d0\u4f9b\u9ad8\u9694\u79bb\u5ea6\uff0c\u4ece\u800c\u9632\u6b62\u4fe1\u53f7\u4ea4\u53c9\u548c\u4e92\u76f8\u5e72\u6270\u3002\u8fd9\u610f\u5473\u7740\u5728\u5c04\u9891\u5f00\u5173\u82af\u7247\u4e2d\uff0c\u4e0d\u540c\u4fe1\u53f7\u8def\u5f84\u4e4b\u95f4\u53ef\u4ee5\u88ab\u6709\u6548\u9694\u79bb\uff0c\u907f\u514d\u4e86\u4fe1\u53f7\u4e4b\u95f4\u7684\u76f8\u4e92\u5f71\u54cd\u548c\u5e72\u6270\u3002\u6b64\u5916\uff0c\u5c04\u9891\u5f00\u5173\u901a\u8fc7\u63a7\u5236\u903b\u8f91\u5b9e\u73b0\u5bf9\u4e0d\u540c\u65b9\u5411(\u63a5\u6536\u6216\u53d1\u5c04)\u3001\u4e0d\u540c\u9891\u7387\u7684\u4fe1\u53f7\u8fdb\u884c\u5207\u6362\uff0c\u4ee5\u8fbe\u5230\u5171\u7528\u5929\u7ebf\u3001\u8282\u7701\u7ec8\u7aef\u4ea7\u54c1\u6210\u672c\u7684\u76ee\u7684\u3002\u8fd9\u79cd\u63a7\u5236\u903b\u8f91\u4e0d\u4ec5\u786e\u4fdd\u4e86\u4fe1\u53f7\u7684\u6b63\u786e\u4f20\u8f93\uff0c\u8fd8\u901a\u8fc7\u7cbe\u786e\u63a7\u5236\u4fe1\u53f7\u7684\u5f00\u5173\u72b6\u6001\uff0c\u51cf\u5c11\u4e86\u4fe1\u53f7\u5728\u4f20\u8f93\u8fc7\u7a0b\u4e2d\u7684\u5e72\u6270\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5728\u5177\u4f53\u5b9e\u73b0\u4e0a\uff0c\u5c04\u9891\u5f00\u5173\u82af\u7247\u53ef\u80fd\u91c7\u7528\u4f18\u5316\u63a7\u5236\u504f\u7f6e\u7684\u65b9\u6cd5\u6765\u63d0\u9ad8\u6027\u80fd\uff0c\u51cf\u5c11CGD(\u7535\u5bb9-\u5bfc\u4f53\u8026\u5408)\u7684\u5f71\u54cd\u3002\u901a\u8fc7\u63a7\u5236\u6805\u6781\u504f\u7f6e\u63d0\u4f9b\u4e86\u4e00\u4e2a\u5c0f\u4fe1\u53f7\u63a5\u5730\uff0c\u4ee5\u62b5\u6d88CGD\u7684\u5f71\u54cd\uff0c\u4ece\u800c\u964d\u4f4e\u963b\u6297\uff0c\u4fdd\u6301\u8f83\u5c0f\u7684\u6676\u4f53\u7ba1\u5c3a\u5bf8\u548c\u826f\u597d\u7684\u9694\u79bb\u6027\u80fd\u3002\u8fd9\u79cd\u4f18\u5316\u63a7\u5236\u504f\u7f6e\u7684\u65b9\u6cd5\u6709\u52a9\u4e8e\u51cf\u5c11\u4fe1\u53f7\u5e72\u6270\uff0c\u63d0\u9ad8\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u6027\u80fd\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5c04\u9891\u5f00\u5173\u82af\u7247\u5728\u51cf\u5c11\u4fe1\u53f7\u5e72\u6270\u65b9\u9762\u7684\u673a\u5236\u4e3b\u8981\u4f9d\u8d56\u4e8e\u5176\u9ad8\u9694\u79bb\u5ea6\u548c\u63a7\u5236\u903b\u8f91\uff0c\u4ee5\u53ca\u901a\u8fc7\u4f18\u5316\u63a7\u5236\u504f\u7f6e\u6765\u51cf\u5c11CGD\u5f71\u54cd\u7684\u65b9\u6cd5\u3002<\/p>\n\n\n\n

    \u3000\u3000\u4e94\u3001 \u672a\u6765\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u65b0\u8d8b\u52bf\u548c\u6f5c\u5728\u521b\u65b0\u70b9\u6709\u54ea\u4e9b?<\/h2>\n\n\n\n

    \u3000\u3000\u672a\u6765\u5c04\u9891\u5f00\u5173\u82af\u7247\u7684\u65b0\u8d8b\u52bf\u548c\u6f5c\u5728\u521b\u65b0\u70b9\u4e3b\u8981\u96c6\u4e2d\u5728\u4ee5\u4e0b\u51e0\u4e2a\u65b9\u9762\uff1a<\/p>\n\n\n\n

    \u3000\u3000\u96c6\u6210\u5ea6\u63d0\u5347<\/strong>\uff1a\u968f\u7740\u6280\u672f\u7684\u53d1\u5c55\uff0c\u5c04\u9891\u5f00\u5173\u82af\u7247\u53ef\u80fd\u4f1a\u8fdb\u4e00\u6b65\u96c6\u6210\u66f4\u591a\u7684\u5c04\u9891\u529f\u80fd\u6a21\u5757\uff0c\u5982\u6ee4\u6ce2\u5668\u3001\u4f4e\u566a\u58f0\u653e\u5927\u5668\u548c\u529f\u7387\u653e\u5927\u5668\u7b49\u3002\u8fd9\u79cd\u96c6\u6210\u53ef\u4ee5\u51cf\u5c0f\u82af\u7247\u7684\u4f53\u79ef\u3001\u91cd\u91cf\u548c\u529f\u8017\uff0c\u540c\u65f6\u63d0\u9ad8\u7cfb\u7edf\u7684\u6574\u4f53\u6027\u80fd\u3002<\/p>\n\n\n\n

    \u3000\u3000\u5148\u8fdb\u5de5\u827a\u7684\u5e94\u7528<\/strong>\uff1a\u5148\u8fdb\u7684RF-SOI(Silicon on Insulator)\u5de5\u827a\u662f\u5c04\u9891\u5f00\u5173\u672a\u6765\u6280\u672f\u53d1\u5c55\u7684\u4e3b\u8981\u8d8b\u52bf\u4e4b\u4e00\u3002SOI\u6280\u672f\u5177\u6709\u5c3a\u5bf8\u5c0f\u3001\u5bc4\u751f\u7535\u5bb9\u5c0f\u3001\u901f\u5ea6\u5feb\u3001\u529f\u8017\u4f4e\u3001\u96c6\u6210\u5ea6\u9ad8\u7b49\u4f18\u70b9\uff0c\u7279\u522b\u9002\u5408\u5f00\u5173\u548c\u8f6c\u6362\u5668\u4f4e\u63d2\u635f\u3001\u9ad8\u7ebf\u6027\u3001\u9ad8\u901f\u7684\u8981\u6c42\u3002\u6b64\u5916\uff0cRF MEMS(\u5fae\u673a\u7535\u7cfb\u7edf)\u5f00\u5173\u4e5f\u6b63\u5728\u6210\u4e3a\u4e1a\u754c\u7684\u91cd\u70b9\u5e03\u5c40\u65b9\u5411\uff0c\u5b83\u80fd\u591f\u663e\u8457\u964d\u4f4e\u63d2\u5165\u635f\u8017\u3001\u63d0\u9ad8\u53ef\u9760\u6027\u3001\u5bff\u547d\u548c\u96c6\u6210\u5ea6\uff0c\u5e76\u5b9e\u73b0\u5355\u5200\u591a\u63b7\u529f\u80fd\uff0c\u6ee1\u8db3\u672a\u6765\u5c04\u9891\u7cfb\u7edf\u591a\u6a21\u591a\u9891\u901a\u4fe1\u7684\u9700\u6c42\u3002<\/p>\n\n\n\n

    \u3000\u3000\u6beb\u7c73\u6ce2\u6280\u672f\u7684\u53d1\u5c55<\/strong>\uff1a\u5728\u6beb\u7c73\u6ce2\u9891\u6bb5(30\u81f3300 GHz)\uff0c\u5c04\u9891\u5f00\u5173\u6280\u672f\u4e5f\u5728\u4e0d\u65ad\u8fdb\u6b65\u3002\u6587\u7ae0\u7efc\u8ff0\u4e86\u591a\u79cd\u9886\u5148\u6280\u672f\uff0c\u5305\u62ec\u57fa\u4e8e\u7845\u3001SiGe\u6216III-V\u534a\u5bfc\u4f53\u57fa\u677f\u4e0a\u7684\u6676\u4f53\u7ba1\u548c\u4e8c\u6781\u7ba1\uff0c\u4ee5\u53ca\u5fae\u673a\u7535\u7cfb\u7edf(MEMS)\u548c\u76f8\u53d8\u6750\u6599\u5f00\u5173\u7b49\u975e\u4f20\u7edf\u89e3\u51b3\u65b9\u6848\u3002\u8fd9\u4e9b\u6280\u672f\u5728\u4e0d\u540c\u53c2\u6570\u4e0a\u7684\u4f18\u52bf\u4f7f\u5176\u5728\u65b0\u901a\u4fe1\u3001\u4f20\u611f\u3001\u6210\u50cf\u7b49\u9886\u57df\u5177\u6709\u91cd\u8981\u5e94\u7528\u6f5c\u529b\u3002<\/p>\n\n\n\n

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